LS 130   MEASUREMENT OF GEOMETRY WITH CCD SENSOR

This unit uses high quality semiconductor laser with a circular beam as a source of the reference straightness. The CCD Sensor measures the straightness error in both perpendicular Y and Z axis.

Statistical methods are used to minimize influence of the air turbulence.

 

 

Set

CCD sensor   LS 130.1
Semiconductor laser   LS 12.1

Technical Data for CCD sensor

Resolution

0,5 um

Repeatability

±1 mm
Range on the Screen ±3 mm

Detailed specifications (PDF file)

Other Products
 
LS 100 Measurment of positioning accuracy in 1 axis
LS 110 OEM multiaxis measument system
LS 120 Measurment of geometry with interferometer
LS 140 Temperature and Air sensors
Customized systems