LS 120   MEASUREMENT OF GEOMETRY WITH LASER INTERFEROMETER

Unit LS 120 contains optics LS 128A for angular calibrations and optomechanical accessory LS 128F for way straightness and flatness measurements

Set

Diferential beamsplitter   LS 128.1
Angular reflector   LS 128.2
Turning mirror   LS 128.3
Base plates   LS 128.X


Technical data
Angular Measurment  

Longitudal range

20 m
Measurment range ±10°
Resolution 0.01’’
Accuracy (± 0.6% ±0.5± 0.1 M) um/m
M – Distance between LS 128.1 a LS 128.2 units in meters

 

Flatness Measurment

 

Longitudal range 

20 m
Measurment range ± 1.5 mm
Resolution 5 nm (base 100 mm)
Accuracy (± 0.6%± 0.02 M2) um
M – Distance between LS 128.1 a LS 128.2 units in meters

Detailed specifications (PDF file)

Other Products
 
LS 100 Measurment of positioning accuracy in 1 axis
LS 110 OEM multiaxis measument system
LS 130 Measument of geometry with CCD sensor
LS 140 Temperature and Air sensors
Customized systems